DURABILITY AND STRUCTURE OF RF-SPUTTERED CARBON-NITROGEN THIN-FILM OVERCOATS ON RIGID DISKS OF MAGNETIC THIN-FILM MEDIA

被引：47

作者：

YEH, TA ^{[1
]}

LIN, CL ^{[1
]}

SIVERTSEN, JM ^{[1
]}

JUDY, JH ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT ELECT ENGN,MINNEAPOLIS,MN 55455

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1991年 / 27卷 / 06期

关键词：

D O I：

10.1109/20.278774

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thin carbon film overcoats were deposited on rigid disks of magnetic thin film media by RF diode sputtering using a mixture of argon and nitrogen gas. Constant Drag Test (CDT) and initial take-off velocity of thin film head sliders were measured using a computer-controlled friction-wear tester. As the nitrogen partial pressure was increased from 0 mTorr to 7-5 mTorr, the number of revolutions before wear failure increased from 3000 to 9000 revolutions and the initial take-off velocity decreased from 3.82 m/sec to 2.58 m/sec. The chemical bonding and elemental composition as determined by XPS and the microstructure as observed by TEM were used to correlate the durability and structure of RF sputtered Carbon-Nitrogen (C: N) thin films.

引用

页码：5163 / 5165

页数：3

共 10 条

[1]

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