The structures of SiO2-supported PtPd alloy clusters with the size of about 20 angstrom which were prepared from the PtPd colloid solutions were investigated by means of EXAFS. The phase shift and amplitude functions were derived from PtPd foils with the atomic ratio of 1:9, 1:1 and 9:1. The curve fitting analyses showed that the PtPd clusters were present in a ''cluster-in-cluster'' structure in which the homogeneous clusters were composed of several smaller clusters composed of the atoms of each metal.