共 5 条
[1]
Neyer, Knoche, Muller, Klein, Yunkin, Fischer, Proc. of 19th European Conf. on Optical Communication (ECOC'93), Montreux, Switzerland, 2, (1993)
[2]
McVittie, Gonzalez, Proc. of the Fifth Symp. on Plasma Processing, The Electrochem. Society, Vol. 85–81, (1985)
[3]
Labunov, Avtjushkov, Melinets, Proc. of 8th Intern. Symp. on Plasma Chemistry, Tokyo, Japan, 4, (1987)
[4]
Gros, Horwitz, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 7 B, (1989)
[5]
Rangelow, Thoren, Masseli, Kassing, Engelhardt, Schwarzl, Microelectronic Engineering, 5, (1986)