ENERGY-DISTRIBUTIONS OF LOW-ENERGY H IONS BACKSCATTERED FROM GRAPHITE, STAINLESS-STEEL, AND MOLYBDENUM

被引：7

作者：

SAIKI, K ^{[1
]}

TANAKA, S ^{[1
]}

KOMA, A ^{[1
]}

机构：

[1] UNIV TSUKUBA,INST MAT SCI,SAKURA,IBARAKI 305,JAPAN

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1982年 / 27卷 / 04期

关键词：

D O I：

10.1007/BF00619090

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：263 / 268

页数：6

共 14 条

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[10] SPUTTERING OF MOLYBDENUM BY LOW-ENERGY HE+ BOMBARDMENT [J].

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