SECONDARY ELECTRONS GENERATED BY FAST NEUTRAL BOMBARDMENT OF THE GROWING FILM DURING LASER ABLATION DEPOSITION

被引：11

作者：

BRONGERSMA, SH ^{[1
]}

KOOLS, JCS ^{[1
]}

BALLER, TS ^{[1
]}

BEIJERINCK, HCW ^{[1
]}

DIELEMAN, J ^{[1
]}

机构：

[1] EINDHOVEN UNIV TECHNOL,5600 MB EINDHOVEN,NETHERLANDS

来源：

APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 11期

关键词：

D O I：

10.1063/1.105484

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Using an ion-probe method, time-of-flight measurements have been performed on the particles produced during excimer ablation of TiN. It is found that the number of ions produced in these ablation processes is quite small. The positive current due to secondary electrons departing from the detector and generated by fast neutral bombardment of the growing film vastly exceeds the current of positive ions arriving at the detector. This renders the ion-probe method unsuited for the determination of ion concentrations and ion velocity distributions.

引用

页码：1311 / 1313

页数：3

共 17 条

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