THE DEVELOPMENT AND APPLICATION OF AN ION IMPLANTER BASED ON ION-THRUSTER TECHNOLOGY

被引：31

作者：

WILBUR, PJ

DANIELS, LO

机构：

来源：

VACUUM | 1986年 / 36卷 / 1-3期

关键词：

D O I：

10.1016/0042-207X(86)90259-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：5 / 9

页数：5

相关论文

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