MEASUREMENTS OF THE SECONDARY ION MASS-SPECTROMETRY ISOTOPE EFFECT

被引:17
作者
SCHWARZ, SA
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 03期
关键词
D O I
10.1116/1.574151
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:308 / 312
页数:5
相关论文
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