SYNTHESIS AND EVALUATION OF CYCLIC OLEFIN SULFONE COPOLYMERS AND TERPOLYMERS AS ELECTRON-BEAM RESISTS

被引：16

作者：

GIPSTEIN, E ^{[1
]}

MOREAU, W ^{[1
]}

CHIU, G ^{[1
]}

NEED, OU ^{[1
]}

机构：

[1] IBM CORP,LAB,SAN JOSE,CA 95193

来源：

JOURNAL OF APPLIED POLYMER SCIENCE | 1977年 / 21卷 / 03期

关键词：

D O I：

10.1002/app.1977.070210309

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：677 / 688

页数：12

共 22 条

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[8] PREPARATION AND PROPERTIES OF SOME POLY(ALPHA-OLEFIN SULFONES) [J].

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[9] POLYSULFONES OF NORBORNENE + DERIVATIVES [J].

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