SIMULTANEOUS EXPOSURE AND DEVELOPMENT TECHNIQUE FOR MAKING GRATINGS ON POSITIVE PHOTORESIST

被引：41

作者：

TSANG, WT

WANG, S

机构：

[1] UNIV CALIF,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720

[2] UNIV CALIF,ELECTR RES LAB,BERKELEY,CA 94720

来源：

APPLIED PHYSICS LETTERS | 1974年 / 24卷 / 04期

关键词：

D O I：

10.1063/1.1655151

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：196 / 199

页数：4

共 10 条

[1] USE OF PHOTORESIST AS A HOLOGRAPHIC RECORDING MEDIUM [J].

BEESLEY, MJ ;

CASTLEDI.JG .

APPLIED OPTICS, 1970, 9 (12) :2720-&

[2]

GERITSEN HJ, 1968, APPL OPT, V7, P11

[3]

HILL FW, UNPUBLISHED

[4] STIMULATED EMISSION IN A PERIODIC STRUCTURE [J].

KOGELNIK, H ;

SHANK, CV .

APPLIED PHYSICS LETTERS, 1971, 18 (04) :152-&

[5] COUPLED-WAVE THEORY OF DISTRIBUTED FEEDBACK LASERS [J].

KOGELNIK, H ;

SHANK, CV .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (05) :2327-+

[6] FORMATION OF OPTICAL WAVEGUIDES IN PHOTORESIST FILMS [J].

OSTROWSKY, DB ;

JACQUES, A .

APPLIED PHYSICS LETTERS, 1971, 18 (12) :556-+

[7] OPTICAL TECHNIQUE FOR PRODUCING 0.1-MU PERIODIC SURFACE-STRUCTURES [J].

SHANK, CV ;

SCHMIDT, RV .

APPLIED PHYSICS LETTERS, 1973, 23 (03) :154-155

[8] PHASE-MATCHABLE NONLINEAR OPTICAL INTERACTIONS IN PERIODIC THIN-FILMS [J].

SOMEKH, S ;

YARIV, A .

APPLIED PHYSICS LETTERS, 1972, 21 (04) :140-&

[9] PROPOSAL OF PERIODIC LAYERED WAVEGUIDE STRUCTURES FOR DISTRIBUTED LASERS [J].

WANG, S .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (02) :767-780

[10] 2-DIMENSIONAL DISTRIBUTED-FEEDBACK LASERS AND THEIR APPLICATIONS [J].

WANG, S ;

SHEEM, S .

APPLIED PHYSICS LETTERS, 1973, 22 (09) :460-462

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