COLUMNAR GRAINS AND TWINS IN HIGH-PURITY SPUTTER-DEPOSITED COPPER

被引：33

作者：

DAHLGREN, SD ^{[1
]}

机构：

[1] BATTELLE MEM INST,PACIFIC NW LABS,RICHLAND,WA 99352

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 04期

关键词：

D O I：

10.1116/1.1312763

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：832 / 836

页数：5

共 14 条

[1]

DAHLGREN SD, 1972, J APPL PHYS, V43, P1514, DOI 10.1063/1.1661352

[2] MICROSTRUCTURE OF SPUTTER-DEPOSITED 304L STAINLESS STEEL [J].

DAHLGREN, SD ;

MCCLANAHAN, ED ;

JOHNSTON, JW ;

GRAYBEAL, AG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1970, 7 (03) :398-+

[3]

DAHLGREN SD, 1970, METALL TRANS, V1, P3095

[4]

DAHLGREN SD, 1971, METALL TRANS, V2, P1753

DAHLGREN, SD .

[6]

DAHLGREN SD, 1970, J APPL PHYS, V41, P1514

[7]

DAHLGREN SD, UNPUBLISHED WORK

[8]

DAHLGREN SD, 1969, 3RD P S DEP THIN FIL, P20

[9]

FLEET SG, 1963, 466 MULL RES LAB REP

[10]

HOFFMAN RW, 1964, THIN FILMS