ORIGIN OF CONTAMINANTS IN PHOTOCHEMICALLY DEPOSITED CHROMIUM FILMS

被引：21

作者：

SINGMASTER, KA ^{[1
]}

HOULE, FA ^{[1
]}

WILSON, RJ ^{[1
]}

机构：

[1] IBM,ALMADEN RES CTR,RES DIV,SAN JOSE,CA 95120

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 12期

关键词：

D O I：

10.1063/1.100062

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1048 / 1050

页数：3

共 16 条

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