HYDROFLUORINATION UNIT FOR PURIFICATION OF FLUORIDE LASER MATERIALS

被引:9
作者
WARSHAW, SI
JACKSON, RE
机构
关键词
D O I
10.1063/1.1719462
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:1774 / +
页数:1
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