FLUXGATE SENSOR IN PLANAR MICROTECHNOLOGY

被引：13

作者：

SEITZ, T

机构：

[1] Landis and Gyr Corporation

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 22卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(89)80081-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A fluxgate magnetometer suitable for contactless reading of extremely weak sources such as documents in magnetic ink, has been developed using planar microtechnology. It is shown that the sensor can be miniaturized using a flat shape of core, which does not need to be surrounded by windings. A one-layer pick-up coil which is easy to fabricate is positioned on top of the core. In batch processing using permalloy films, the sensors can be made all alike. This is important for the compensation of the earth's field by means of two sensors. © 1990.

引用

页码：799 / 802

页数：4