DESIGN AND FABRICATION OF HIGHLY EFFICIENT FAN-OUT ELEMENTS

被引：43

作者：

HERZIG, HP

PRONGUE, D

DANDLIKER, R

机构：

[1] Institute of Microtechnology, University of Neuchâtel, Neuchâtel, CH-2000

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 07期

关键词：

Cgh; Dammann grating; Fan-out; Hoe; Kinoform; Phase grating;

D O I：

10.1143/JJAP.29.L1307

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper reports the calculation and fabrication of periodic phase structures for fan-out elements with a theoretical conversion efficiency close to 100% and perfect uniformity. We have measured an efficiency of 92% for a smooth kinoform structure fabricated in photoresist by laser beam writing lithography. © 1990 The Japan Society of Applied Physics.

引用

页码：L1307 / L1309

页数：3