SURFACE ANALYSIS OF INSULATING MATERIALS BY SECONDARY ION MASS-SPECTROMETRY (SIMS)

被引：31

作者：

MULLER, G ^{[1
]}

机构：

[1] BAYER AG,D-4150 KREFELD,FED REP GER

来源：

APPLIED PHYSICS | 1976年 / 10卷 / 04期

关键词：

D O I：

10.1007/BF00920616

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：317 / 324

页数：8

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