POLYIMIDE-SILICA MICROCOMPOSITE FILMS

被引:24
作者
BREVAL, E
MULVIHILL, ML
DOUGHERTY, JP
NEWNHAM, RE
机构
[1] Center for Dielectric Studies, Materials Research Laboratory, Pennsylvania State University, University Park, 16802, PA
关键词
D O I
10.1007/BF01116027
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Planarizing films of fine-grained silica embedded in polyimide have been prepared by a spin-coating technique and their structure has been investigated by optical and electron microscopy. The films were found to be diphasic. A silica content near 9 vol % yields a well mixed silica/polyimide composite which is homogeneous down to nanometre scale and has good planarization characteristics. Films with contents of 3 and 6 vol % silica have rough surfaces and exhibit two forms of segregation. In the 3% case, elongated inclusions of such silica/polyimide material appear at approximately 100-mu-m islands in a pure polyimide matrix. In the 6% case, the pure polyimide appears as approximately 100-mu-m elongated lakes surrounded by silica/polyimide material.
引用
收藏
页码:3297 / 3300
页数:4
相关论文
共 5 条
[1]  
BOYD DC, 1980, KIRK OTHMER ENCY CHE, V11, P826
[2]  
LOW IM, 1988, J MATER SCI, V32, P4141
[3]  
ROSSI RD, 1990, SOLID STATE TECHNOL, V31, pS1
[4]   RECENT PRODUCT ADVANCES IN THERMOPLASTIC COMPOSITES [J].
THEBERGE, JE .
POLYMER-PLASTICS TECHNOLOGY AND ENGINEERING, 1981, 16 (01) :41-53
[5]  
VANVLACK L, 1971, MATER SCI ENG, P390