POLYIMIDE-SILICA MICROCOMPOSITE FILMS

被引：24

作者：

BREVAL, E

MULVIHILL, ML

DOUGHERTY, JP

NEWNHAM, RE

机构：

[1] Center for Dielectric Studies, Materials Research Laboratory, Pennsylvania State University, University Park, 16802, PA

来源：

JOURNAL OF MATERIALS SCIENCE | 1992年 / 27卷 / 12期

关键词：

D O I：

10.1007/BF01116027

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Planarizing films of fine-grained silica embedded in polyimide have been prepared by a spin-coating technique and their structure has been investigated by optical and electron microscopy. The films were found to be diphasic. A silica content near 9 vol % yields a well mixed silica/polyimide composite which is homogeneous down to nanometre scale and has good planarization characteristics. Films with contents of 3 and 6 vol % silica have rough surfaces and exhibit two forms of segregation. In the 3% case, elongated inclusions of such silica/polyimide material appear at approximately 100-mu-m islands in a pure polyimide matrix. In the 6% case, the pure polyimide appears as approximately 100-mu-m elongated lakes surrounded by silica/polyimide material.

引用

页码：3297 / 3300

页数：4