NEW ALGORITHM FOR MONOCHROMATIC ELLIPSOMETRY OF DOUBLE ABSORBING LAYERS

被引：4

作者：

BOSCH, S

MONZONIS, F

机构：

[1] Laboratori d'Optica, Departament de Física Aplicada i Electrónica, Universitat de Barcelona, 08028 Barcelona

来源：

SURFACE SCIENCE | 1994年 / 321卷 / 1-2期

关键词：

D O I：

10.1016/0039-6028(94)90036-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The generalization of a numerical inversion procedure for the analysis of single angle, single wavelength ellipsometric data of double layer samples is described. Within this new scheme, data reduction for any double absorbing layer configuration is easily accomplished, eliminating constraints of the previous method and still leading to a simple one-dimensional root-finding numerical scheme.

引用

页码：156 / 160

页数：5

共 12 条

[1]

AZZAM RMA, 1977, ELLIPSOMETRY POLARIZ, pCH4

[2] DOUBLE-LAYER ELLIPSOMETRY - AN EFFICIENT NUMERICAL-METHOD FOR DATA-ANALYSIS [J].