MEASUREMENT OF METALLIC FILM DENSITIES BY AN OPTICAL TECHNIQUE

[1] AISENBERG S, 1963, 10 T NAT VAC S, P457

[2] BEHRNDT KH, 1960, 7 VAC S T, P87

[3] APPARENT DENSITY OF THIN EVAPORATED FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1954, 25 (03) : 338 - 340

[4] DEVIENNE FM, 1954, CR HEBD ACAD SCI, V238, P2397

[5] HEISING RA, 1946, QUARTZ CRYSTALS ELEC

[6] LINS SJ, 1960, 7 VAC S T, P333

[7] VERWENDUNG VON SCHWINGQUARZEN ZUR WAGUNG DUNNER SCHICHTEN UND ZUR MIKROWAGUNG [J]. ZEITSCHRIFT FUR PHYSIK, 1959, 155 (02): : 206 - 222

[8] THE THICKNESS MEASUREMENT OF THIN FILMS BY MULTIPLE BEAM INTERFEROMETRY [J]. JOURNAL OF APPLIED PHYSICS, 1950, 21 (09) : 843 - 846

[9] Tolansky S., 1948, MULTIPLE BEAM INTERF

[10] DENSITY MEASUREMENTS OF SOME THIN COPPER FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1959, 30 (10) : 1604 - 1609

[1] AISENBERG S, 1963, 10 T NAT VAC S, P457

[2] BEHRNDT KH, 1960, 7 VAC S T, P87

[3] APPARENT DENSITY OF THIN EVAPORATED FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1954, 25 (03) : 338 - 340

[4] DEVIENNE FM, 1954, CR HEBD ACAD SCI, V238, P2397

[5] HEISING RA, 1946, QUARTZ CRYSTALS ELEC

[6] LINS SJ, 1960, 7 VAC S T, P333

[7] VERWENDUNG VON SCHWINGQUARZEN ZUR WAGUNG DUNNER SCHICHTEN UND ZUR MIKROWAGUNG [J]. ZEITSCHRIFT FUR PHYSIK, 1959, 155 (02): : 206 - 222

[8] THE THICKNESS MEASUREMENT OF THIN FILMS BY MULTIPLE BEAM INTERFEROMETRY [J]. JOURNAL OF APPLIED PHYSICS, 1950, 21 (09) : 843 - 846

[9] Tolansky S., 1948, MULTIPLE BEAM INTERF

[10] DENSITY MEASUREMENTS OF SOME THIN COPPER FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1959, 30 (10) : 1604 - 1609