ENERGY-BEAM-INDUCED SYNTHESIS OF THIN GESE2 AND GESE FILMS

被引：12

作者：

ANTONIADIS, C

JOLIET, MC

机构：

来源：

THIN SOLID FILMS | 1984年 / 115卷 / 01期

关键词：

D O I：

10.1016/0040-6090(84)90317-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：75 / 84

页数：10

共 16 条

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[10] SOLID-PHASE GROWTH OF LARGE ALIGNED GRAINS DURING SCANNED LASER CRYSTALLIZATION OF AMORPHOUS-GE FILMS ON FUSED-SILICA [J].

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