PHOTOEMISSION SPECTROSCOPY STUDY OF ALUMINUM-POLYIMIDE INTERFACE

被引：133

作者：

BARTHA, JW ^{[1
]}

HAHN, PO ^{[1
]}

LEGOUES, F ^{[1
]}

HO, PS ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.572786

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1390 / 1393

页数：4

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