CALIBRATION METHOD FOR ROTATING-ANALYZER ELLIPSOMETERS

被引：49

作者：

DENIJS, JMM

HOLTSLAG, AHM

HOEKSTA, A

VANSILFHOUT, A

机构：

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1988年 / 5卷 / 09期

关键词：

D O I：

10.1364/JOSAA.5.001466

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：1466 / 1471

页数：6

共 8 条

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[4] SYSTEMATIC AND RANDOM ERRORS IN ROTATING-ANALYZER ELLIPSOMETRY [J].

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JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1988, 5 (06) :773-781

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[6]

HOLTSLAG AHM, 1986, THESIS TWENTE U ENSC

[7] IMPROVED MEASUREMENT METHOD IN ROTATING-ANALYZER ELLIPSOMETRY [J].

KAWABATA, S .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1984, 1 (07) :706-710

[8] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].

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