APPLICATION OF THE NEEDLE SENSOR FOR MICROSTRUCTURE MEASUREMENTS AND ATOMIC-FORCE MICROSCOPY

被引：15

作者：

GRUNEWALD, U

BARTZKE, K

ANTRACK, T

机构：

[1] Carl Zeiss Jena GmbH, Department of Optical Metrology

来源：

THIN SOLID FILMS | 1995年 / 264卷 / 02期

关键词：

ATOMIC FORCE MICROSCOPY; MICROSTRUCTURES; PROBES; SENSORS;

D O I：

10.1016/0040-6090(95)05816-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Measuring steep microstructures by means of force microscopy is limited by non-linearity of commonly used piezoelectric tube scanners and the geometry of probes mounted on conventional cantilevers. Principles of how to overcome such difficulties are described, possibly resulting in new techniques for force- and other near-field probe microscopy.

引用

页码：169 / 171

页数：3