INFRARED REFLECTANCE OF THIN ALUMINUM NITRIDE FILMS ON VARIOUS SUBSTRATES

被引：34

作者：

MACMILLAN, MF

DEVATY, RP

CHOYKE, WJ

机构：

[1] Department of Physics and Astronomy, University of Pittsburgh, Pittsburgh

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 07期

关键词：

D O I：

10.1063/1.108595

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The measured room-temperature infrared reflectance at near-normal incidence of thin AlN films deposited by metalorganic chemical vapor deposition on various substrates is compared with calculated spectra based on Lorentz oscillator models for the reststrahl regions with parameters obtained from the literature. The effects of film and substrate anisotropy and non-normal incidence are included. The contribution of AlN can be analyzed even when the substrate and/or a thin overlayer have overlapping reflection bands. It is possible to obtain information on the thickness and other properties of the AlN films.

引用

收藏

页码：750 / 752

页数：3

相关论文

共 16 条

[1] INFRARED LATTICE VIBRATION OF VAPOUR-GROWN AIN [J].

AKASAKI, I ;

HASHIMOTO, M .

SOLID STATE COMMUNICATIONS, 1967, 5 (11) :851-+

[2] INFRARED ABSORPTION AT LONGITUDINAL OPTIC FREQUENCY IN CUBIC CRYSTAL FILMS [J].

BERREMAN, DW .

PHYSICAL REVIEW, 1963, 130 (06) :2193-&

[3] RAMAN SPECTRA OF ALN CUBIC BN AND BP [J].

BRAFMAN, O ;

LENGYEL, G ;

MITRA, SS ;

GIELISSE, PJ ;

PLENDL, JN ;

MANSUR, LC .

SOLID STATE COMMUNICATIONS, 1968, 6 (08) :523-&

[4] OPTICAL PHONONS OF ALUMINUM NITRIDE [J].

CARLONE, C ;

LAKIN, KM ;

SHANKS, HR .

JOURNAL OF APPLIED PHYSICS, 1984, 55 (11) :4010-4014

[5] LATTICE VIBRATION SPECTRA OF ALUMINUM NITRIDE [J].

COLLINS, AT ;

LIGHTOWLERS, EC ;

DEAN, PJ .

PHYSICAL REVIEW, 1967, 158 (03) :833-+

[6] III-V NITRIDES FOR ELECTRONIC AND OPTOELECTRONIC APPLICATIONS [J].

DAVIS, RF .

PROCEEDINGS OF THE IEEE, 1991, 79 (05) :702-712

[7]

Edwards D. F., 1985, HDB OPTICAL CONSTANT, P547

[8] OPTICAL LATTICE VIBRATIONS IN FINITE IONIC CRYSTALS .3. [J].

ENGLMAN, R ;

RUPPIN, R .

JOURNAL OF PHYSICS PART C SOLID STATE PHYSICS, 1968, 1 (06) :1515-+

[9] 2-COMPONENT MODEL FOR THE RESISTIVITY AND NOISE OF TUNNELING METAL-INSULATOR COMPOSITES [J].

MANTESE, JV ;

CURTIN, WA ;

WEBB, WW .

PHYSICAL REVIEW B, 1986, 33 (12) :7897-7901

[10] INFRARED ABSORPTION MEASUREMENTS OF SURFACE MODES AND FINITE SIZE EFFECTS IN PRISM-LIKE CRYSTALS OF ALN [J].

PASTRNAK, J ;

HEJDA, B .

PHYSICS LETTERS A, 1969, A 29 (06) :314-&