HIGH-RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY OF PROTON-IMPLANTED GALLIUM-ARSENIDE

被引:19
作者
SADANA, DK
ZAVADA, JM
JENKINSON, HA
SANDS, T
机构
[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,DIV MAT & MOLEC RES,BERKELEY,CA 94720
[2] USA,RES OFF,RES TRIANGLE PK,NC 27709
[3] USA,CTR ARMAMENT RES & DEV,DOVER,NJ 07801
关键词
D O I
10.1063/1.96060
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:691 / 693
页数:3
相关论文
共 10 条
[1]  
Andersen H. H., 1977, HYDROGEN STOPPING PO, V3
[2]   ISOLATION OF JUNCTION DEVICES IN GAAS USING PROTON BOMBARDMENT [J].
FOYT, AG ;
LINDLEY, WT ;
WOLFE, CM ;
DONNELLY, JP .
SOLID-STATE ELECTRONICS, 1969, 12 (04) :209-&
[3]   OPTICAL WAVEGUIDING IN PROTON-IMPLANTED GAAS [J].
GARMIRE, E ;
STOLL, H ;
YARIV, A ;
HUNSPERGER, RG .
APPLIED PHYSICS LETTERS, 1972, 21 (03) :87-+
[4]  
NEETHLING JH, 1984, AIME PUBLICATION, P427
[5]   CRYSTALLOGRAPHIC RELATIONSHIPS BETWEEN GAAS, AS AND GA2O3 AT THE GAAS-THERMAL OXIDE INTERFACE [J].
SANDS, T ;
WASHBURN, J ;
GRONSKY, R .
MATERIALS LETTERS, 1985, 3 (5-6) :247-250
[6]   DAMAGE DISTRIBUTION AND MEASURE OF PROJECTED RANGE IN PROTON BOMBARDED GAAS [J].
SNYMAN, HC ;
NEETHLING, JH .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1982, 60 (1-4) :147-154
[7]   TRANSMISSION ELECTRON-MICROSCOPY OF EXTENDED CRYSTAL DEFECTS IN PROTON BOMBARDED AND ANNEALED GAAS [J].
SNYMAN, HC ;
NEETHLING, JH .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 69 (3-4) :199-230
[8]  
WILSON RG, 1985, J APPL PHYS, V57, P2299
[9]  
ZAVADA JM, 1985, P SOC PHOTO-OPT INST, V530, P182, DOI 10.1117/12.946485
[10]  
ZAVADA JM, 1984, P SOC PHOTO-OPT INST, V463, P72, DOI 10.1117/12.941350