CORRELATION OF CHEMISTRY WITH POLYMERIZATION RATE IN AN RF DISCHARGE OF METHANE

被引：27

作者：

SMOLINSKY, G ^{[1
]}

VASILE, MJ ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY | 1976年 / A 10卷 / 03期

关键词：

D O I：

10.1080/00222337608061193

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：473 / 482

页数：10

共 9 条

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[3] IONIC AND NEUTRAL PRODUCTS OF AN RF DISCHARGE IN METHANE
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[4] RADIATION-FIELDS OF A TAPERED FILM AND A NOVEL FILM-TO-FIBER COUPLER
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[J]. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1975, MT23 (01) : 79 - 85
[5] 2-LAYERED CONSTRUCTION OF INTEGRATED OPTICAL CIRCUITS AND FORMATION OF THIN-FILM PRISMS, LENSES, AND REFLECTORS
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[J]. APPLIED PHYSICS LETTERS, 1974, 24 (11) : 547 - 549
[6] Vasile M. J., 1974, International Journal of Mass Spectrometry and Ion Physics, V13, P381, DOI 10.1016/0020-7381(74)83018-4
[7] Vasile M. J., 1973, International Journal of Mass Spectrometry and Ion Physics, V12, P133, DOI 10.1016/0020-7381(73)80096-8
[8] MASS-SPECTROMETRIC SAMPLING OF IONIC AND NEUTRAL SPECIES PRESENT IN DIFFERENT REGIONS OF AN RF DISCHARGE IN METHANE
VASILE, MJ
SMOLINSKY, G
[J]. INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1975, 18 (02): : 179 - 192
[9] ORGANOSILICON FILMS FORMED BY AN RF PLASMA POLYMERIZATION PROCESS
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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (04) : 451 - &