FORMATION OF POLYIMIDE-CU COMPLEXES - IMPROVEMENT OF DIRECT CU-ON-PI AND PI-ON-CU ADHESION

被引:29
作者
LEE, KW
WALKER, GF
VIEHBECK, A
机构
[1] IBM Research Division, T. J. Watson Research Center, NY 10598, Yorktown Heights
关键词
POLYIMIDE; COPPER; ADHESION; PASSIVATION; LAMINATION;
D O I
10.1163/156856195X00941
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
Polyimides containing triazole or imidazole functionalities have been synthesized. Poly(3,3',4,4'-benzophenone tetracarboxylic dianhydride-3,5-diamino-1,2,4-triazole) (BTDA-TADA) contains triazole groups as repeat units and poly(4,4'-oxydiphthalic anhydride-1,3-aminophenoxybenzene-8-azaadenine) (ODPA-APB-8-azaadenine) consists of triazole (8-azaadenine) groups as the end caps. While the BTDA-TADA polyimide starts to decompose at 350 degrees C, the ODPA-APB-8-azaadenine polyimide is thermally stable at 400 degrees C. The peel strength of copper to BTDA-TADA polyimide without surface modification is 200-400 J/m(2). For the adhesion of polyimide to copper, ODPA-APB-8-azaadenine polyisoimide (1.0 mu m) and poly(pyromellitic dianhydride-oxydianiline) (20 mu m) were coated onto the copper substrate and then the two layers were cured together to polyimides at 400 degrees C. Peel strengths of 500-800 J/m(2) were obtained. The failure of the copper/polyimide interface by peeling either the copper or the polymer layer occurred in the near-interface region of the polymer. Both PI/Cu and Cu/PI adhesion was enhanced due to the formation of Cu-polyimide complexes. In the case of PI/Cu adhesion, the polymer chain flexibility of ODPA-APB-8-azaadenine polyimide also plays a significant role in improving adhesion.
引用
收藏
页码:1125 / 1141
页数:17
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