FLUORINE PASSIVATION OF STAINLESS-STEEL

被引：16

作者：

MIKI, N ^{[1
]}

MAENO, M ^{[1
]}

MARUHASHI, K ^{[1
]}

NAKAGAWA, Y ^{[1
]}

OHMI, T ^{[1
]}

机构：

[1] TOHOKU UNIV,FAC ENGN,DEPT ELECTR,SENDAI,MIYAGI 980,JAPAN

来源：

CORROSION SCIENCE | 1990年 / 31卷

关键词：

Corrosion-free; Fluoridation; Modification; Outgas-free; Passivation; Stoichiometric;

D O I：

10.1016/0010-938X(90)90092-J

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Fluorine passivation technology of metal surface for ULSI process equipments is investigated and the passivated film quality is evaluated. Well-polished and pretreated bare surfaces of stainless steel are passivated with oxygen-free high pure fluorine (O2 and HF less than 1 wppm) and a uniform and stable passivated surface is obtained by direct fluoridation and succeeding thermal modification (heat-treatment in nitrogen) (1) (2). It has been confirmed that the nonstoichiometric structure produced by the first step fluoridation is converted to the stoichiometric structure by the thermal modification. Passivation performance such as corrosion-free and outgas-free is achieved as a result of this thermal modification effect. © 1990.

引用

页码：69 / 74

页数：6

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