INTEGRATED ARRAY SENSOR FOR DETECTING ORGANIC-SOLVENTS

被引:80
作者
GARDNER, JW
PIKE, A
DEROOIJ, NF
KOUDELKAHEP, M
CLERC, PA
HIERLEMANN, A
GOPEL, W
机构
[1] UNIV NEUCHATEL,INST MICROTECHNOL,CH-2000 NEUCHATEL,SWITZERLAND
[2] UNIV TUBINGEN,INST PHYS & THEORET CHEM,CTR INTERFACE ANAL & SENSORS,D-72076 TUBINGEN,GERMANY
关键词
SENSOR ARRAYS; ORGANIC SOLVENT DETECTION; SILICON NITRIDE;
D O I
10.1016/0925-4005(94)01573-Z
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A new sensor array device has been designed to detect organic solvents; it comprises an array of six interdigital sensors lying upon a micromachined 0.5 mu m thick silicon nitride membrane. There are three separate micromachined cells with two sensors per cell. In each cell, a thin film platinum resistance thermometer/heater is sandwiched in the middle of the silicon nitride layer in order to either monitor or control the temperature of the active layer. The array device has a low power consumption of approximate to 30 mW/sensor at 400 degrees C and is capable of operating at temperatures in excess of 600 degrees C, making it suitable for inorganic (e.g., SnO2) as well as organic gas-sensitive materials. The sensor array device has been coated with both polymers and semiconducting oxides and its response to toluene, n-propanol and n-octane has been studied. The low power consumption and good thermal stability of this array device make it useful for application in portable gas monitoring equipment.
引用
收藏
页码:135 / 139
页数:5
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