REDUCTION OF ION SPUTTERING YIELD BY SPECIAL SURFACE MICROTOPOGRAPHY

被引：43

作者：

ZIEGLER, JF

CUOMO, JJ

ROTH, J

机构：

[1] IBM CORP,YORKTOWN HTS,NY 10598

[2] MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER

来源：

APPLIED PHYSICS LETTERS | 1977年 / 30卷 / 06期

关键词：

D O I：

10.1063/1.89380

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：268 / 271

页数：4

相关论文

共 19 条

[1] MEASUREMENT OF EROSION OF STAINLESS-STEEL, CARBON, AND SIC BY HYDROGEN BOMBARDMENT IN ENERGY-RANGE OF 0.5-7.5 KEV
BEHRISCH, R
BOHDANSKY, J
OETJEN, GH
ROTH, J
SCHILLING, G
VERBEEK, H
[J]. JOURNAL OF NUCLEAR MATERIALS, 1976, 60 (03) : 321 - 329
[2] BEHRISCH R, 1975, PLASMA PHYSICS CONTR
[3] BLEWER RS, 1976, J NUCL MATER, V63, P337, DOI 10.1016/0022-3115(76)90348-2
[4] BOHDANSKY J, 1976, 9TH P S FUS TECHN
[5] FEASIBILITY STUDY OF A HONEYCOMB VACUUM WALL FOR FUSION REACTORS
CRAMER, SN
OBLOW, EM
[J]. NUCLEAR FUSION, 1975, 15 (02) : 339 - 343
[6] REDUCTION OF SURFACE EROSION CAUSED BY HELIUM BLISTERING - MICROSTRUCTURAL EFFECTS
DAS, SK
KAMINSKY, M
ROSSING, TD
[J]. APPLIED PHYSICS LETTERS, 1975, 27 (04) : 197 - 199
[7] DAS SK, 1976, 1975 C I PHYS LOND, P293
[8] DIELECTRIC THIN FILMS THROUGH RF SPUTTERING
DAVIDSE, PD
MAISSEL, LI
[J]. JOURNAL OF APPLIED PHYSICS, 1966, 37 (02) : 574 - &
[9] IMPURITY PROBLEM IN QUASI STEADY-STATE TOROIDAL PLASMA EXPERIMENTS AND FUSION REACTORS
DUCHS, D
HAAS, G
PFIRSCH, D
VERNICKE.H
[J]. JOURNAL OF NUCLEAR MATERIALS, 1974, 53 (01) : 102 - 106
[10] MECHANISM OF SURFACE BLISTERING ON METALS IRRADIATED WITH HELIUM IONS
EVANS, JH
[J]. JOURNAL OF NUCLEAR MATERIALS, 1976, 61 (01) : 1 - 7