CHEMICAL BONDING AT THE POLYIMIDE SURFACE

被引:71
作者
HAHN, PO [1 ]
RUBLOFF, GW [1 ]
HO, PS [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期
关键词
D O I
10.1116/1.572565
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:756 / 760
页数:5
相关论文
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