MEASUREMENT OF RESIDUAL-STRESSES IN FILMS OF UNKNOWN ELASTIC-MODULUS

被引：6

作者：

CUTHRELL, RE

GERSTLE, FP

MATTOX, DM

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 06期

关键词：

D O I：

10.1063/1.1140310

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1018 / 1020

页数：3

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[7] DESIGN AND PERFORMANCE OF A MOVABLE POST-CATHODE MAGNETRON SPUTTERING SYSTEM FOR MAKING PBFA-II ACCELERATOR ION SOURCES [J].

MATTOX, DM ;

CUTHRELL, RE ;

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DREIKE, PL .

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[8]

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