MICROCRYSTALLINE SILICON THIN-FILMS FOR SENSOR APPLICATIONS

被引：16

作者：

GERMER, W

机构：

来源：

SENSORS AND ACTUATORS | 1985年 / 7卷 / 02期

关键词：

D O I：

10.1016/0250-6874(85)85014-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：135 / 142

页数：8

共 11 条

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