STUDIES OF LASER-GENERATED ULTRASOUND USING A MICROMACHINED SILICON ELECTROSTATIC TRANSDUCER IN AIR

被引:40
作者
WRIGHT, WMD [1 ]
SCHINDEL, DW [1 ]
HUTCHINS, DA [1 ]
机构
[1] QUEENS UNIV,DEPT PHYS,KINGSTON K7L 3N6,ON,CANADA
关键词
D O I
10.1121/1.409826
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
An air-coupled micromachined silicon electrostatic transducer has been used to detect ultrasound generated by a pulsed laser in metals and polymers. Bulk longitudinal and shear wave modes have been observed, as have Rayleigh waves in thick samples and Lamb waves in thinner plates. The results are in good agreement with surface displacement waveforms obtained using a contact capacitance device as a reference. The result is a flexible noncontact ultrasonic system with potential uses in materials characterization.
引用
收藏
页码:2567 / 2575
页数:9
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