X-RAY-DIFFRACTION FROM A COHERENTLY ILLUMINATED SI(001) GRATING SURFACE

被引：36

作者：

SHEN, Q

UMBACH, CC

WESELAK, B

BLAKELY, JM

机构：

[1] CORNELL UNIV,SCH APPL & ENGN PHYS,ITHACA,NY 14853

[2] CORNELL UNIV,DEPT MAT SCI & ENGN,ITHACA,NY 14853

来源：

PHYSICAL REVIEW B | 1993年 / 48卷 / 24期

关键词：

D O I：

10.1103/PhysRevB.48.17967

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

High-resolution synchrotron x-ray diffraction from a Si(001) grating surface reveals resolution-limited grating interference peaks around each Bragg reflection. The peaks can be explained by kinematic scattering theory using the concept of a grating form factor. The positions and the intensities of the satellite peaks yield structural information such as the period, the width, and the height of the gratings, as well as its shape and it's orientation and registry with respect to substrate lattice, and possible crystal strains.

引用

页码：17967 / 17971

页数：5

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