PRESSURE CONTROLLED FEEDING SYSTEM FOR VACUUM FLASH EVAPORATION

被引:3
作者
FUENZALIDA, V [1 ]
BELTRAN, N [1 ]
GRAHMANN, C [1 ]
PEREZ, M [1 ]
机构
[1] UNIV CHILE,FAC CIENCIAS FIS & MATEMAT,DEPT INGN ELECT,SANTIAGO,CHILE
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 06期
关键词
D O I
10.1116/1.576336
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:3205 / 3207
页数:3
相关论文
共 9 条
[1]  
CHOPRA KL, 1969, THIN FILM PHENOMENA, P18
[2]  
Felix-Valdez J., 1987, Revista Mexicana de Fisica, V33, P583
[3]   Y-BA-CU-O SUPERCONDUCTING THIN-FILMS PREPARED BY FLASH EVAPORATION [J].
HATOU, T ;
TAKAI, Y ;
HAYAKAWA, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1988, 27 (04) :L617-L618
[4]  
HOLLAND L, 1958, VACUUM DEPOSITION TH, P195
[6]  
MULLER EM, 1963, ELECTROCHEM TECHNOL, V1, P158
[7]  
ROBERTS RW, 1964, ULTRAHIGH VACUUM ITS, P9
[8]  
Slack J. R., 1970, Thin Solid Films, V6, P233, DOI 10.1016/0040-6090(70)90122-7
[9]  
SRAMCHENKO SM, 1986, INORG MATER US, V21, P1076