ION CURRENT MODULATION OF A RESIDUAL-GAS ANALYZER

被引：14

作者：

WATANABE, F ^{[1
]}

ISHIMARU, H ^{[1
]}

机构：

[1] NATL LAB HIGH ENERGY PHYS,OHO,IBARAKI 350,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期

关键词：

D O I：

10.1116/1.572888

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2192 / 2195

页数：4

共 12 条

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[9] MASS PEAKS FROM ADSORBED GASES IN A SINGLE-FOCUSING MASS SPECTROMETER [J].

ROBINS, JL .

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[10] USING THE MODULATING ION CURRENT GAUGE FOR TOTAL PRESSURE MEASUREMENTS BELOW 10-10 TORR WITHOUT ERRORS CAUSED BY ELECTRON-STIMULATED ION DESORPTION [J].

WATANABE, F ;

HIRAMATSU, S ;

ISHIMARU, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (01) :54-56

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