ENERGY-DISTRIBUTIONS OF NEUTRAL ATOMS SPUTTERED BY VERY LOW-ENERGY HEAVY-IONS

被引:49
作者
BRIZZOLARA, RA
COOPER, CB
OLSON, TK
机构
关键词
D O I
10.1016/0168-583X(88)90095-X
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:36 / 42
页数:7
相关论文
共 17 条
[1]  
BAY HL, 1987, NUCL INSTRUM METH B, V18, P430
[2]   EXPERIMENTS ON THE SPUTTERING OF NEUTRAL CU-2 DIMERS FROM CU BY AR+ IONS (60-300 EV) [J].
COOPER, CB ;
HAMED, HA .
SURFACE SCIENCE, 1984, 143 (01) :215-222
[3]  
DEMBOWSKI J, 1987, NUCL INSTRUM METH B, V18, P464
[4]  
ECKSTEIN W, 1987, NUCL INSTRUM METH B, V18, P344
[5]  
IOUP GE, COMMUNICATION
[6]   ENERGY DISTRIBUTION IN SPUTTERING PROCESSES [J].
OECHSNER, H .
PHYSICAL REVIEW LETTERS, 1970, 24 (11) :583-&
[7]  
OECHSNER H, 1977, 7 P INT C AT COLL SO, V2, P55
[8]  
SIGMUND P, 1972, REV ROUM PHYS, V17, P1079
[9]  
Sigmund P., 1981, TOP APPL PHYS, V47
[10]   ENERGY DISTRIBUTION OF ATOMS SPUTTERED FROM POLYCRYSTALLINE METALS [J].
STUART, RV ;
WEHNER, GK ;
ANDERSON, GS .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (02) :803-&