A STUDY OF THE INTERACTION BETWEEN THERMALLY DEPOSITED ALUMINUM FILMS AND FLUOROPOLYMER SUBSTRATES

被引:19
作者
DU, YZ [1 ]
GARDELLA, JA [1 ]
机构
[1] SUNY BUFFALO, DEPT CHEM, BUFFALO, NY 14260 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1995年 / 13卷 / 04期
关键词
D O I
10.1116/1.579678
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Aluminum was thermally deposited onto fluoropolymer substrates. The effects of interfacial reaction of aluminum with several fluoropolymeric substrates were investigated. These included PFA (poly[tetrafluoroethylene-co-perfluoro(alkoxy vinyl ether)]), FEP (poly(tetrafluoroethylene-co-hexafluoropropylene), and hydroxylated FEP (m-FEP). The hydroxyl modification was prepared by a previously developed radio frequency glow discharge (RFGD) method. X-ray photoelectron spectroscopy (XPS) studies of thin (similar to 30 Angstrom) Al deposited samples showed the formation of new fluorine-containing species, due to fluorine diffusion into the Al overlayers. Auger and XPS depth profiles bf samples with thick (similar to 200 Angstrom) Al overlayers also suggested the diffusion of fluorine and the formation of Al fluorides at the interface. The RFGD modification process prior to the Al deposition was performed to investigate potential adhesion of Al to the substrates. This is envisioned as a reaction between Al and RFGD introduced oxygen. The resulting Al/oxide interface limits the diffusion of fluorine. (C) 1995 American Vacuum Society.
引用
收藏
页码:1907 / 1912
页数:6
相关论文
共 30 条
[1]   ESCA STUDY OF TERMINATION OF PASSIVATION OF ELEMENTAL METALS [J].
BARR, TL .
JOURNAL OF PHYSICAL CHEMISTRY, 1978, 82 (16) :1801-1810
[2]  
BEAUPREZ E, UNPUB SECONDARY ION, P609
[3]  
BERNIER MH, 1990, ACS SYM SER, V440, P147
[4]  
BODO P, 1990, ACS SYM SER, V440, P333
[5]   FORMATION OF A COPPER-OXYGEN-POLYMER COMPLEX ON POLYSTYRENE [J].
BURKSTRAND, JM .
APPLIED PHYSICS LETTERS, 1978, 33 (05) :387-389
[6]   FORMATION OF METAL-OXYGEN-POLYMER COMPLEXES ON POLYSTYRENE WITH NICKEL AND CHROMIUM [J].
BURKSTRAND, JM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (04) :1072-1074
[7]   METAL-POLYMER INTERFACES - ADHESION AND X-RAY PHOTOEMISSION-STUDIES [J].
BURKSTRAND, JM .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (07) :4795-4800
[8]  
CHANG CA, 1990, ACS SYM SER, V440, P416
[9]   ANGLE-RESOLVED X-RAY PHOTOELECTRON-SPECTROSCOPY METHOD FOR THE THICKNESS MEASUREMENT OF METAL-OXIDE METAL ULTRATHIN FILMS [J].
CHEN, LY ;
HOFFMAN, RW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04) :2303-2307
[10]  
DOMINGUE A, 1990, ACS SYM SER, V440, P272