SUB-MICRON TRENCHING OF SEMICONDUCTOR NANOSTRUCTURES

被引:12
作者
LEE, KY
SMITH, TP
FORD, CJB
HANSEN, W
KNOEDLER, CM
HONG, JM
KERN, DP
机构
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D O I
10.1063/1.101805
中图分类号
O59 [应用物理学];
学科分类号
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页码:625 / 627
页数:3
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