CRYSTALLOGRAPHIC RELATIONSHIPS BETWEEN GAAS, AS AND GA2O3 AT THE GAAS-THERMAL OXIDE INTERFACE

被引:19
作者
SANDS, T
WASHBURN, J
GRONSKY, R
机构
[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,CTR ADV MAT,BERKELEY,CA 94720
[2] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,DIV MAT & MOLEC RES,BERKELEY,CA 94720
[3] BELL COMMUN RES,MURRAY HILL,NJ 07974
关键词
D O I
10.1016/0167-577X(85)90066-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:247 / 250
页数:4
相关论文
共 17 条
[1]   THE PREPARATION OF CROSS-SECTION SPECIMENS FOR TRANSMISSION ELECTRON-MICROSCOPY [J].
BRAVMAN, JC ;
SINCLAIR, R .
JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1984, 1 (01) :53-61
[2]   STUDIES OF THERMALLY-OXIDIZED GAAS BY TRANSMISSION ELECTRON-MICROSCOPY [J].
BULL, CJ ;
SEALY, BJ .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1978, 37 (04) :489-500
[3]  
Emel'yanov A. V., 1976, Soviet Physics - Crystallography, V20, P373
[4]  
GRONSKY R, 1984, MAT RES SOC S P, V31, P1
[5]   THERMAL OXIDATION OF GAAS [J].
MINDEN, HT .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (08) :733-733
[6]   OXIDATION OF GAP AND GAAS [J].
RUBENSTEIN, M .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (06) :540-+
[7]  
Schwartz B., 1975, Critical Reviews in Solid State Sciences, V5, P609, DOI 10.1080/10408437508243518
[8]   ARSENIC INCORPORATION IN NATIVE OXIDES OF GAAS GROWN THERMALLY UNDER ARSENIC TRIOXIDE VAPOR [J].
SCHWARTZ, GP ;
GRIFFITHS, JE ;
DISTEFANO, D ;
GUALTIERI, GJ ;
SCHWARTZ, B .
APPLIED PHYSICS LETTERS, 1979, 34 (11) :742-744
[9]  
SEALY BJ, 1974, THIN SOLID FILMS, V22, pS38
[10]  
SHENG TT, 1976, IEEE T ELECTRON DEV, V23, P531, DOI 10.1109/T-ED.1976.18447