PHYSICAL-PROPERTIES OF METAL A-C-H-COMPOSITE FILMS

被引：8

作者：

BIEDERMAN, H ^{[1
]}

CHUDACEK, I ^{[1
]}

SLAVINSKA, D ^{[1
]}

MARTINU, L ^{[1
]}

DAVID, J ^{[1
]}

NESPUREK, S ^{[1
]}

机构：

[1] CZECHOSLOVAK ACAD SCI,INST MACROMOLEC CHEM,CS-11142 PRAGUE 1,CZECHOSLOVAKIA

来源：

VACUUM | 1989年 / 39卷 / 01期

关键词：

D O I：

10.1016/0042-207X(89)90086-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：13 / 15

页数：3

共 16 条

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[3]

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[4] CARBON AND COMPOSITE CARBON METAL-FILMS DEPOSITED IN AN RF GLOW-DISCHARGE OPERATED IN ORGANIC GASES [J].

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ZEMEK, J .

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[5] PLASMA DEPOSITION AND PROPERTIES OF COMPOSITE METAL POLYMER AND METAL HARD CARBON-FILMS [J].

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[6]

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[7]

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[8]

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[9] STRUCTURE, OPTICAL-PROPERTIES AND DECOMPOSITION KINETICS OF SPUTTERED HYDROGENATED CARBON [J].

CRAIG, S ;

HARDING, GL .

THIN SOLID FILMS, 1982, 97 (04) :345-361

[10] HARD CARBON COATINGS WITH LOW OPTICAL-ABSORPTION [J].

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BUBENZER, A ;

KOIDL, P .

APPLIED PHYSICS LETTERS, 1983, 42 (08) :636-638

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