THE STRUCTURE AND PROPERTIES OF ION-IMPLANTED AL2O3

被引:21
作者
MCHARGUE, CJ
FARLOW, GC
WHITE, CW
APPLETON, BR
ANGELINI, P
NARAMOTO, H
机构
关键词
D O I
10.1016/0168-583X(85)90310-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
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页码:569 / 573
页数:5
相关论文
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