FIXED ABRASIVE GRINDING OF CVD SIC MIRRORS

被引：23

作者：

BIFANO, T

YI, Y

KAHL, WK

机构：

[1] Aerospace and Mechanical Engineering Department, Boston University, Boston, MA

[2] Oak Ridge National Laboratory, Oak Ridge, TN

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1994年 / 16卷 / 02期

基金：

美国国家科学基金会;

关键词：

CERAMIC MACHINING; DUCTILE-REGIME GRINDING; OPTICAL FABRICATION; ULTRAPRECISION GRINDING;

D O I：

10.1016/0141-6359(94)90195-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A strategy for machining ceramic (silicon carbide) mirrors is described. By taking advantage of the relative ductility of ceramics compared with that of glass, ft is shown that fixed-abrasive, ultraprecision grinding is a viable fabrication process for high-performance aspheric mirrors. Also, it is shown that ductile grinding of ceramic substrates can produce optical quality surfaces, particularly in infrared applications. Laboratory-scale ductile-regime grinding of chemically vapor deposited silicon carbide is described, as is a scale-up of the technology to a commercially available ultraprecision machine tool that has been retrofitted for grinding aspheric ceramic components.

引用

页码：109 / 116

页数：8

共 20 条

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