PLASMA SOURCE ION-IMPLANTATION TECHNIQUE FOR SURFACE MODIFICATION OF MATERIALS

被引：1002

作者：

CONRAD, JR

RADTKE, JL

DODD, RA

WORZALA, FJ

TRAN, NC

机构：

[1] UNIV WISCONSIN,DEPT MET ENGN,MADISON,WI 53706

[2] UNIV WISCONSIN,CTR MAT SCI,MADISON,WI 53706

来源：

关键词：

D O I：

10.1063/1.339055

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4591 / 4596

页数：6

共 31 条

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[4] CONRAD JR, 1987, 1987 IEEE INT C PLAS, P124
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[9] WEAR-RESISTANCE OF NITROGEN-IMPLANTED STEELS
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EICHINGER, P
[J]. MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01): : 181 - 190
[10] SURFACE MICROANALYTICAL STUDIES OF NITROGEN ION-IMPLANTED STEEL
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BAUMANN, SM
NORBERG, JC
LEGG, KO
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 219 - 227