WIDE-BAND BRAGG REFLECTORS MADE WITH SILICA ON SILICON WAVE-GUIDES

被引：5

作者：

ADAR, R

HENRY, CH

KISTLER, RC

KAZARINOV, RF

WEINER, JS

机构：

[1] AT and T Bell Laboratories, Murray Hill

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 16期

关键词：

D O I：

10.1063/1.107152

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report the fabrication of strong Bragg reflectors embedded into fiber matched silica on silicon waveguides. First order gratings are dry etched into the waveguide core and are covered with a thin Si3N4 layer prior to cladding deposition. Reflection bands 225 angstrom wide for TE and 193 angstrom wide for TM polarizations are obtained with 200 angstrom Si3N4 cover layers. The TE and TM spectra are overlapping, resulting in nearly polarization independent Bragg reflectors.

引用

页码：1924 / 1926

页数：3

共 6 条

[1]

ADAR R, IN PRESS APPL PHYS L

[2]

AGRAWAL GP, 1986, LONG WAVELENGTH SEMI, P305

[3] COMPOUND BRAGG REFLECTION FILTERS MADE BY SPATIAL-FREQUENCY DOUBLING LITHOGRAPHY [J].

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JEWELL, TE ;

POL, V ;

OLSSON, NA ;

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ORLOWSKY, KJ .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1989, 7 (09) :1379-1385

[4]

HENRY CH, 1988, J LIGHTWAVE TECHNOL, V8, P748

[5] LOW-LOSS BRAGG REFLECTORS ON SIO2-SI3N4-SIO2 RIB WAVE-GUIDES [J].

LEE, HJ ;

HENRY, CH ;

KAZARINOV, RF ;

ORLOWSKY, KJ .

APPLIED OPTICS, 1987, 26 (13) :2618-2620

[6] NARROWBAND BRAGG REFLECTOR FILTER AT 1.52-MU-M [J].

LEE, HJ ;

OLSSON, NA ;

HENRY, CH ;

KAZARINOV, RF ;

ORLOWSKY, KJ .

APPLIED OPTICS, 1988, 27 (02) :211-213

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