(ELECTRO)MECHANICAL CHARACTERISTICS OF ELECTROSTATICALLY DRIVEN VACUUM ENCAPSULATED POLYSILICON RESONATORS

被引：8

作者：

TILMANS, HAC

LEGTENBERG, R

SCHURER, H

IJNTEMA, DJ

ELWENSPOEK, M

FLUITMAN, JHJ

机构：

[1] MESA Research Institute, University of Twente

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1994年 / 41卷 / 01期

关键词：

D O I：

10.1109/58.265813

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 mum long, 100 mum wide, and 1.5 mum thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18 000 were measured below 0.01 mbar.

引用

页码：4 / 6

页数：3

共 15 条

[1] THE APPLICATION OF FINE-GRAINED, TENSILE POLYSILICON TO MECHANICALLY RESONANT TRANSDUCERS [J].

GUCKEL, H ;

SNIEGOWSKI, JJ ;

CHRISTENSON, TR ;

RAISSI, F .

SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :346-351

[2]

GUCKEL H, 1985, 3RD INT C SOL STAT S, P90

[3] RESONANT-MICROBRIDGE VAPOR SENSOR [J].

HOWE, RT ;

MULLER, RS .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1986, 33 (04) :499-506

[4]

IKEDA K, 1988, 7TH SENS S TOK, P193

[5]

IKEDA K, 1988, 7TH SENS S TOK, P55

[6]

LEWIS JD, 1988, INTECH, V35, P44

[7]

LINDER C, 1991, SENSOR ACTUAT A-PHYS, V25, P591

[8]

PETERSEN K, 1991, 6TH P INT C SOL STAT, P664

[9]

PUTTY MW, 1989, FEB P IEEE MICR EL M, P60

[10]

SAIGUSA T, 1992, 15 YOK TECHN REP, P103

← 1 2 →