THE NEW HEIDELBERG PROTON MICROPROBE - THE SUCCESS OF A MINIMAL CONCEPT

被引：28

作者：

TRAXEL, K ^{[1
]}

ARNDT, P ^{[1
]}

BOHSUNG, J ^{[1
]}

BRAUNDULLAEUS, KU ^{[1
]}

MAETZ, M ^{[1
]}

REIMOLD, D ^{[1
]}

SCHIEBLER, H ^{[1
]}

WALLIANOS, A ^{[1
]}

机构：

[1] MAX PLANCK INST KERNPHYS,D-69117 HEIDELBERG,GERMANY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1995年 / 104卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(95)00396-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The new proton microprobe is characterized by modular mounting resulting in easy maintenance, low cost personal computer (PC) system and several new features. The most important of these being the design of the lens, its location inside the vacuum, and an elaborate system for beam monitoring. The PC system allows for all kinds of standard data acquisition, beam and target positioning and an automated and quick routine for beam profile analysis. The ionoptical properties fulfil the expectations, which is not true for the brightness delivered from a Penning ion source. Focusing to a submicron beam spot results therefore in a beam current of approximate to 1 pA only. Tuning to 100 pA enlarges the spot to 3 x 3 mu m(2).

引用

页码：19 / 25

页数：7

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