THE USE OF FAST HEAVY-IONS TO IMPROVE THIN-FILM ADHESION

被引：66

作者：

JACOBSON, S ^{[1
]}

JONSSON, B ^{[1
]}

SUNDQVIST, B ^{[1
]}

机构：

[1] TANDEM ACCELERATOR LAB,UPPSALA,SWEDEN

来源：

THIN SOLID FILMS | 1983年 / 107卷 / 01期

关键词：

D O I：

10.1016/0040-6090(83)90011-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：89 / 98

页数：10

共 9 条

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