DETOUR-PHASE KINOFORM INTERCONNECTS - THE CONCEPT AND FABRICATION CONSIDERATIONS

被引：32

作者：

TURUNEN, J ^{[1
]}

FAGERHOLM, J ^{[1
]}

VASARA, A ^{[1
]}

机构：

[1] HERIOT WATT UNIV,DEPT PHYS,EDINBURGH EH14 4AS,MIDLOTHIAN,SCOTLAND

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1990年 / 7卷 / 07期

关键词：

D O I：

10.1364/JOSAA.7.001202

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The concept of detour phase in computer-generated holography is generalized here to specify K-level phasetransmission functions that approximate optimized, periodic Fourier-transform-type carrier-frequency kinoforms. Combined with standard microlithographic techniques, this concept is shown to open up a possibility of generating (using K = 8) fully arbitrary space-invariant holographic interconnects characterized by negligible reconstruction error (<2%) and high diffraction efficiency (75-95%) into the desired pattern. © 1990 Optical Society of America.

引用

页码：1202 / 1208

页数：7

共 24 条

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