CONTACTLESS NONDESTRUCTIVE MEASUREMENT OF BULK AND SURFACE RECOMBINATION USING FREQUENCY-MODULATED FREE CARRIER ABSORPTION

被引：42

作者：

SANII, F ^{[1
]}

GILES, FP ^{[1
]}

SCHWARTZ, RJ ^{[1
]}

GRAY, JL ^{[1
]}

机构：

[1] PURDUE UNIV,SCH ELECT ENGN,W LAFAYETTE,IN 47907

来源：

SOLID-STATE ELECTRONICS | 1992年 / 35卷 / 03期

关键词：

D O I：

10.1016/0038-1101(92)90234-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A measurement procedure is described which allows the contactless measurement of bulk lifetime and surface recombination. The procedure uses the the free-carrier absorption of a long-wavelength laser beam by a modulated free-carrier wave to measure and separate the bulk recombination from the surface recombination. The dependence of the absorption on the modulation frequency is used to accomplish the separation. Limitations of the technique are also discussed.

引用

页码：311 / 317

页数：7